Click to view our Program for MAEBL 2020!
[https://drive.google.com/a/maebl.org/file/d/1wE1SfO-IZFoPSclc2CNhV1vt_iiVtyeU/view?usp=sharing]The
4th annual Meeting for Advanced Electron Beam Lithography (MAEBL) will
be hosted by the California Institute of Technology Monday-Tuesday,
April 6-7, 2020.
MAEBL is a two day event that brings together the brightest minds in
electron beam lithography throughout North America. The first day
features the MAEBL Foundations Workshop geared for novice/beginners in
electron beam lithography and is highly recommended for academic
researchers seeking guidance during the onset of their
nano-lithographic work. Learn the fundamentals in machine agnostic
tool operation, data preparation, process development, etc. Novice to
advanced e-beam lithographers are invited to participate in the
Foundations Workshop to learn, brush-up or help mentor others on the
fundamentals of EBL. Advanced attendees are encouraged to impart
personal accounts and challenges to the audience, elevating the
workshop experience. At the end of the meeting beginners should be
conversant in EBL and are encouraged to participate in day two: the
MAEBL Core Workshop
Day Two is the Core Workshop that started it all. Be part of the
conversation and learn something new (or old). Arrive early to
network, receive your name badge and to grab a coffee/light
continental breakfast. Bring your business cards, laptop computer with
designs and SEM images of your issues and an open mind. The goal of
the meeting is to connect active novice to experienced EBL tool owners
and users to openly exchange practical and directly applicable EBL
knowledge in an open forum format. The event features invited talks
from users in the field. In the years past, attendees have networked
with like minded researchers and scientists and witnessed invited
talks from Argonne National Laboratory, the National Institute of
Standards and Technology, IBM, Ohio State University, The Pennsylvania
State University, the University of Delaware, Brookhaven National
Laboratory, Caltech, Yale, the University of Pennsylvania, Sandia
National Laboratory and MIT (to name a few).
Program Highlights (View Program
[https://drive.google.com/a/maebl.org/file/d/1wE1SfO-IZFoPSclc2CNhV1vt_iiVtyeU/view?usp=sharing]):
* Over 4 hours of programmed networking, including two 30 minute
coffee breaks and an hour for lunch.
* Common Challenges, our open forum group discussion promotes
engagement by allowing users to pose open questions to the attendees.
Topics of discussion include but are not limited to:
* Proximity Effect Correction
* Resist Characterization
* Scripting and Automation
* Pattern Fidelity Enhancement
* Throughput Enhancement
* Pattern Transfer (Etch and/or Lift-off)
* Anti-charging
* Field Stitching
* Beam Drift
* Image Processing
* Data Preparation
* Simulation
* Device Fabrication
REGISTRATION
Registration helps to defer food costs for the venue. To qualify to
attend, you must be an active EBL tool owner/user at a recognized
academic, industry, or government lab and must sign up using your
institution's e-mail. On-site registration will not be available. You
must sign-up online in advance. Thank you for your cooperation and
understanding.
PARKING
On site parking is available at 370 South Holliston Ave, Pasadena, CA
91106. Parking is $9/day.
GETTING HERE
You can fly into the Los Angeles International Airport (LAX) or
Hollywood Burbank Airport (BUR). It is about an hour drive from LAX,
and a 30 minute drive from BUR.
HOTELS
Note: Please call hotel directly and mention Caltech to receive
discounted rate. Rates subject to availability and hotel occupancy.
The Saga
1633 E Colorado Blvd, PASADENA, CA (0.6 miles to campus)
(626) 795-0431 | The Saga Motel [http://www.thesagamotorhotel.com/]
The Vagabond Inn - PASADENA
1203 E. Colorado Blvd, PASADENA, CA (0.6 miles to campus; no Caltech
rate)
626-449-3170 | The Vagabond Inn
[https://www.vagabondinn.com/vagabond-inn-executive-pasadena]
The Hilton PASADENA
168 S Los Robles Ave, PASADENA, CA (1.1 miles to campus; free shuttle)
626-577-1000 | The Hilton Pasadena
[http://www.hilton.com/search/hi/us/ca/pasadena/0/00000000000/0/0/0/0/50?wt.srch=1]
The Sheraton PASADENA
303 E. Cordova St, PASADENA CA (1.3 miles to campus; free shuttle)
626-449-4000 | The Sheraton Pasadena
[http://www.sheratonpasadena.com/]
The Courtyard by Marriott
180 N Fair Oaks Ave, PASADENA, CA (2.1 miles to campus)
626-403-7600 | The Courtyard by Marriott
[http://www.marriott.com/hotels/travel/laxot-courtyard-los-angeles-pasadena-old-town/]
The Langham Huntington Hotel & Spa
(formerly The Ritz Carlton)
1401 South Oak Knoll Ave., PASADENA, CA 91106 (2.5 miles to campus)
626-568-3900 | The Langham
The Westin PASADENA
191 N. Los Robles Ave. PASADENA, CA 91101 (1.2 miles to campus; free
shuttle)
626-304-1408 | Westin Pasadena
[https://www.marriott.com/hotels/travel/laxpw-the-westin-pasadena/]
REFUNDS
Registration refunds are available until March 30, 2020 (7 days prior
to the event date); this means refunds cannot be issued beginning
March 30, 2020, due to the catering reservation.
ABOUT MAEBL
Go to www.maebl.org [http://www.maebl.org]
food
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08/04/2020 Last update